Micro Optical Elements

- miGIO-

miGIO micro-optical elements are products realized by combining Nippon Sheet Glass's core strengths in materials development, imprint manufacturing technology, and optical design expertise.
They feature high durability, high precision, and excellent mass-production capability, and are compatible with reflow processes up to 330°C.
In addition, sol-gel glass with heat resistance exceeding 500°C is also available.
Nippon Sheet Glass provides end-to-end support, from optical design through mass production, delivering solutions to a wide range of optical challenges.

Examples of Applications

miGIO are widely used across various industries--including optical equipment, medical devices, industrial equipment, automotive applications, and optical communications--leveraging their high durability, high precision, and excellent mass-production capability.

Projectors

Example 1

Projectors

As laser output continues to increase, our high heat‑resistant diffusers are used as an effective solution for speckle reduction.With 97% transmittance, they also contribute to maintaining high projector brightness.

Analytical Instruments

Example 2

Analytical Instruments

Our high-efficiency diffraction gratings, achieving over 90% utilization efficiency, are used in analytical instruments.
Custom products made of glass materials are available, offering high heat resistance and long-term durability.

LiDAR

Example 3

LiDAR

In environments where standard resin materials cannot meet performance requirements, our organic-inorganic hybrid materials and glass materials can be applied.
Manufactured using imprint technology, they enable high-precision mass production.

miGIO
Micro-Optical Elements

Highly Durable Materials

Point 1

Highly Durable Materials

  • Nippon Sheet Glass has developed and owns proprietary sol-gel glass and organic-inorganic hybrid materials.
  • These materials offer excellent heat resistance, chemical resistance, weather resistance, and low thermal expansion.
  • They are compliant with Tecordia standards and compatible with reflow processes up to 330°C.
High Precision with Mass-Production Capability

Point 2

High Precision with Mass-Production Capability

  • High Precision with Mass-Production Capability
  • Using imprint manufacturing technology with molds, we achieve high quality consistency and excellent scalability for mass production.
  • Optical elements can be formed simultaneously over large areas of up to 8 inches.
  • Wafer alignment accuracy of ±1 µm or better enables optical elements to be formed only at required locations on the wafer.
Advanced Optical Design Expertise

Point 3

Advanced Optical Design Expertise

  • We offer the design and manufacturing of a wide range of optical elements, including diffusers, DOE (diffractive optical elements), MLAs, and moth-eye structures.
  • Our optical design engineers work closely with customers to design optimal optical elements tailored to specific challenges and requirements.
Diffuser

01

Diffuser

Main Specifications of the Diffuser

The basic specifications are outlined below. If you have any requirements beyond these specific

Organic-Inorganic Hybrid Sol-Gel Glass
Diffusion Angle Up to approx. 120° Up to approx. 20°
Angular Variation ±2° (for 70° type) ±0.2° (for 3° type)
Transmittance Approx. 97% Approx. 97%
Wavelength Range Approx. 400-2,000 nm Approx. 200-2,500 nm
Heat Resistance 330°C 500°C
Organic-Inorganic Hybrid
Diffusion Angle Up to approx. 120°
Angular Variation ±2° (for 70° type)
Transmittance Approx. 97%
Wavelength Range Approx. 400-2,000 nm
Heat Resistance 330°C
Sol-Gel Glass
Diffusion Angle Up to approx. 20°
Angular Variation ±0.2° (for 3° type)
Transmittance Approx. 97%
Wavelength Range Approx. 200-2,500 nm
Heat Resistance 500°C

These specifications are general and may vary depending on the operating conditions.

Diffuser

Examples of Diffuser Production

Manufactured using glass imprint technology with sol-gel glass or organic-inorganic hybrid materials that offer excellent heat resistance and laser durability.
We also provide optical design support in-house.
In addition, custom development for special applications, such as diffusers with integrated electrodes, is available.

Example of Diffusion Pattern (1)

Example of Diffusion Pattern (1)
Circular, 95°, flat-top

Example of Diffusion Pattern (2)

Example of Diffusion Pattern (2)
Circular, 50°, batwing

Example of Diffusion Pattern (3)

Example of Diffusion Pattern (3)
Rectangular, 82° x 64°, batwing

Example of Diffusion Pattern (4)

Example of Diffusion Pattern (4)
Rectangular, 72° x 56°, batwing

Example of Diffusion Pattern (5)

Example of Diffusion Pattern (5)
Rectangular, 44° x 16°, flat-top

Grating/DOE

02

Grating/DOE

Examples of Diffraction Grating Specifications and Production Cases

The examples below show typical specifications and production cases.
We are capable of manufacturing a wide variety of diffraction gratings and DOEs.
Please feel free to contact us regarding custom products or requests beyond the examples shown.

Our high heat‑resistant and highly durable sol‑gel glass is used in devices that operate under high‑temperature conditions.

Material Sol-gel glass
Minimum Pitch 190 nm (approx. 5,200 lines/mm)
Type Transmission type, Reflection type
Coating Al, Au, etc.
Structure Blazed, Grating, etc.
Substrate Various types of glass
Heat Resistance 500°C
Example 1 Example 2 Example 3
Line Density (lines/mm) 300 2000 Pitch: 1μm
Type Reflection type Transmission type DOE
Coating Au - -
Structure Blazed Rectangular 16-step
Substrate Synthetic quartz Tempax Float® D263Teco®
Utilization Efficiency 85% 90% 80%
Example 1
Line Density (lines/mm) 300
Type Reflection type
Coating Au
Structure Blazed
Substrate Synthetic quartz
Utilization Efficiency 85%
Example 2
Line Density (lines/mm) 2000
Type Transmission type
Coating -
Structure Rectangular
Substrate Tempax Float®
Utilization Efficiency 90%
Example 3
Line Density (lines/mm) Pitch: 1μm
Type DOE
Coating -
Structure 16-step
Substrate D263Teco®
Utilization Efficiency 80%

These specifications are general and may vary depending on the operating conditions.

Grating/DOE
MLA (Micro Lens Array)

03

MLA (Micro Lens Array)

Examples of Micro Lens Array (MLA) Production

The examples below illustrate typical production cases; however, we are capable of manufacturing a wide variety of MLAs. Please feel free to contact us for custom designs and requirements.
Production is performed with alignment accuracy of ±1μm or less, and the products are compatible with reflow processes.
They are widely used in various applications, including optical

Material Organic-Inorganic Hybrid Organic-Inorganic Hybrid
Pitch 127μm 250μm
Lens diameter 120μm 200μm
Number of lenses 1 x 72ch 2 x 12ch
Material Organic-Inorganic Hybrid
Pitch 127μm
Lens diameter 120μm
Number of lenses 1 x 72ch
Material Organic-Inorganic Hybrid
Pitch 250μm
Lens diameter 200μm
Number of lenses 2 x 12ch
MLA (Micro Lens Array)
Others

04

Others

Other Applications of Imprint Technology

Lens on Wafer (LoW)

Lens on Wafer (LoW)

This technology enables lens formation directly on semiconductor wafers using imprint processes.
It eliminates the need for complex alignment procedures, allows for thin-profile designs, and is compatible with reflow processes.

Precision Structure

Precision Structure

Imprint technology can also be applied beyond optical applications to manufacture a wide range of precision components.
This manufacturing method offers excellent mass-production capability, achieving both high precision and high scalability.

Core Technologies

Imprinting is a technology that uses a mold to transfer the shape of the mold onto components.

Imprint Manufacturing Process

(1) Pre-treatment
(1) Pre-treatment
(2) Molding (UV curing/Heat curing)
(2) Molding
(UV curing/Heat curing)
(3) Demolding
(3) Demolding
(4) Post-treatment
(4) Post-treatment

One-Stop Service from Design to Mass Production

Nippon Sheet Glass offers end-to-end support, from optical design through mass production.
In addition to optical element fabrication, we also provide value-added processes, such as AR (anti-reflection) coating on element surfaces.

Design

Design

Optical design

Structural design

Mold

Mold

Machining

Laser Patterning

Electron Beam (EB) Writing

Proprietary Materials

High Precision

High Durability

Large-Area Molds

Lens

Lens

Shape Accuracy

High Adhesion

Low Residual Stress

High Reliability

Reflow Heat Resistance

Low Water Absorption

Chemical Resistance

Forming

Forming

Alignment

Thickness Control

On-Target Forming

Lithography

Double-Sided Forming

Handling

Handling

Functional Wafers

Patterned Substrates

Ultra-Thin Substrates

Fragile Substrates

8-Inch Wafers

Additional Processing

Additional Processing

Thin-Film Deposition

Dicing/Cutting

Spin Cleaning

Inspection

Inspection

Optical Performance

Positional Accuracy

Thickness

Appearance

Automated Inspection

Mapping

Design

We provide optical and structural design services tailored to a wide range of customer requirements and specifications..

Mold Fabrication

Molds are fabricated using the most suitable methods to meet specific requirements.High-precision molds can be produced in large formats and offer excellent durability, making them ideal for mass production.

Lens Materials

Our proprietary organic-inorganic hybrid materials enable high-fidelity shape replication and provide excellent durability, including reflow heat resistance exceeding 330°C.

Imprinting/Forming

Optical elements such as lenses can be formed on various substrates, including glass and semiconductor wafers.We can control alignment or form lenses on-target, and the areas where no resin is applied can be freely defined.

Handling

Even patterned functional wafers and thin, fragile substrates can be safely protected and processed.

Additional Processing

We also offer value-added processes such as thin-film deposition, dicing, and cleaning, according to customer requirements.

Inspection

Key inspection items--including optical performance, positional accuracy, thickness, and appearance--are evaluated using automated inspection systems, and the results can be mapped for analysis.

Contact NSG

NSG's micro-optical elements have continuously evolved by responding to market needs and customer requirements.
No matter how challenging the request, we deliver solutions through advanced technology, creating the best outcomes for people and society.
We invite you to contact NSG and discuss your needs with us.